Numerical Simulation of Mechatronic Sensors and Actuators
by Manfred Kaltenbacher
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Microelectromechanical systemsMechatronicsStructural MechanicsRF and Optical Engineering MicrowavesFeld <Physik>Instrumentation Electronics and MicroelectronicsMicromachinesAktorOptics and ElectrodynamicsContinuum Mechanics and Mechanics of Materials