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Plasma-aided nanofabrication
by K. Ostrikov, Ken Ostrikov, Shuyan Xu
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No online reader is advertised for this title Nanostructured materialsLow temperature plasmasManufacturing processesPlasma engineeringNanotechnologyPlasma physicsTechnologyTechnology & Industrial ArtsScience/MathematicsElectronics - Microelectronics