Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
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Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
by James E. Potzick
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No online reader is advertised for this title StandardsCalibrationSpectraMasksMicroscopesMeasurementChromiumIntegrated circuits