Capacitive Silicon Resonators

by Nguyen Van Toan, Takahito Ono

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Dielectric resonatorsElectric resonatorsNanoelectromechanical systemsSemiconductorsRésonateurs diélectriquesRésonateurs électriquesNanosystèmes électromécaniquesSemi-conducteursSemiconductorTECHNOLOGY

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